Method and apparatus for measuring size of particle or defect

Details Method and apparatus for measuring size of particle or defect Method and apparatus for measuring size of particle or defect

1993-03-25

1995-11-28

Limanek, Robert P.

Optics: measuring and testing

For size of particles

By particle light scattering

356339, 356338, 250574, 2502222, 25055945, G01N 1502, G01N 2153

Patent

active

054712980

ABSTRACT:
A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.

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