Method and apparatus for measuring sheet resistance

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S763010, C324S1540PB

Reexamination Certificate

active

06870386

ABSTRACT:
A resistance measurement circuit includes a plurality of current sources, a plurality of resistor strings and a comparator. Each resistor string is coupled in series with a respective one of the current sources and includes a plurality of nodes with different resistances relative to a reference node. Each node in each resistor string has a different resistance relative to the reference node than corresponding nodes in the other resistor strings. The comparator has a first comparison input coupled to a reference voltage and a second comparison input selectively coupled to the plurality of nodes in each resistor string.

REFERENCES:
patent: 6509739 (2003-01-01), Voogel et al.
patent: 6683465 (2004-01-01), Fetterman et al.

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