Method and apparatus for measuring shape of heat treatment jig

Details Method and apparatus for measuring shape of heat treatment jig Method and apparatus for measuring shape of heat treatment jig

2008-01-28

2010-02-23

Caputo, Lisa M (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specimen clamp, holder, or support

Reexamination Certificate

active

07665367

ABSTRACT:
A method for measuring the shape of a heating treatment jig to be held by a holding portion of a vertical heat treatment apparatus includes measuring the shape of the heat treatment jig in a state that the position of a supporting portion for supporting the heat treatment jig is set to be the same as the position of the holding portion for the heat treatment jig in the vertical heat treatment apparatus. The heat treatment jig can be used for placing a semiconductor wafer to be subjected to heat treatment.

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patent: 7442038 (2008-10-01), Adachi
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patent: 7-45691 (1995-02-01), None
patent: 9-199438 (1997-07-01), None
patent: 2005-101161 (2005-04-01), None

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