Radiant energy – Luminophor irradiation
Patent
1993-03-25
1995-01-10
Dzierzynski, Paul M.
Radiant energy
Luminophor irradiation
2504591, G01N 2164
Patent
active
053810163
ABSTRACT:
Provided are a method and an apparatus for measuring photoluminescence, which can measure the inside of crystal such as silicon. A lifetime of fluorescence-generating carrier may be evaluated in a mathematical technique without using an expensive pulse laser source. Also, an incident beam wavelength dependency and a polarization dependency of fluorescence may be evaluated by a simple method. A laser having a wavelength which can go into a crystal is projected into an object crystal, fluorescence in generated light inside the crystal is separated through a filter having a frequency band for transmission of fluorescence. An intensity and a spread of fluorescence are obtained as a function of depth from a surface of the crystal to evaluate the lifetime of luminescent center in a mathematical manner. The projection light wavelength dependency of fluorescence may be evaluated by rotating a narrow-band filter, and a polarization dependency by suitably inserting a polarizing filter into an optical patch.
REFERENCES:
patent: 4169228 (1979-09-01), Briska et al.
Japanese journal of Applied Physics, vol. 22, No. 4, Apr. 1983, pp. L207-L209, Moriya et al, "Observation of Lattice Defencts in GaAs and Heat-treated Si Crystals in Infrared Light Scattering Tomography".
Applied Physics A: Solids and Surfaces A50 (1990) Jun., No. 6, Berlin, DE, Steigmeier et al, "Light Scattering Tomography and Photoluminescence Topography".
Dzierzynski Paul M.
Hanig Richard
Mitsui Minings & Melting Co., Ltd.
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