Method and apparatus for measuring oscillation amplitude of...

Measuring and testing – Vibration – Sensing apparatus

Reexamination Certificate

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C228S001100, C228S110100

Reexamination Certificate

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07819013

ABSTRACT:
An apparatus and method for detecting the oscillation amplitude of a bonding tool includes a sensing unit disposed adjacent to and at a distance from the bonding tool. The sensing unit includes a pair of electrodes, a piezoelectric sensing layer located between the pair of electrodes, and a membrane associated with the piezoelectric sensing layer. The piezoelectric sensing layer becomes sensitive to ultrasonic vibrations and generates electrical voltage signals after being activated by a poling process. An optional pre-amplifier is used to amplify the signals generated from the sensing unit, and an oscilloscope is used to further process the signals.

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