Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-06-14
2005-06-14
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06906806
ABSTRACT:
A method and apparatus for measuring motion of an object substantially orthogonal to an optical axis of an interferometer. The method includes the steps of obtaining a first interferogram and a second interferogram, wherein each of the first and second interferograms includes intensity information of each of at least two pixels, and determining the motion of the object from the first and the second interferograms in response to the difference of the intensity gradients of the pixels in the first and second interferograms in the orthogonal direction. The system includes a first interferogram including intensity information of each of at least two pixels and a second interferogram including intensity information of each of at least two pixels. The system also includes a gradient processor calculating the intensity gradients of the first and second interferograms in the orthogonal direction and a motion processor calculating the motion of the object from the first and the second interferograms in response to the difference of the intensity gradients of the first and second interferograms in the orthogonal direction.
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Lyons Michael A.
Toatley , Jr. Gregory J.
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