Method and apparatus for measuring microlevel difference

Details Method and apparatus for measuring microlevel difference Method and apparatus for measuring microlevel difference

1988-06-22

1991-01-29

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

049881981

ABSTRACT:
An apparatus for measuring a very small difference comprises a stage for receiving a sample to be measured, a light source illuminating the sample, an optical system for condensing light reflected from the sample, structure for intercepting a portion of the reflected light, a spectroscope for analyzing the condensed reflected light and a detector for detecting spectrum of the analyzed light. Light reflected only from a main surface of the sample is intercepted by the intercepting structure. Thus, the signal to noise ratio of the reflected light is reduced to enhance measurement capability.

REFERENCES:
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 4254337 (1981-03-01), Yasujima et al.
patent: 4615620 (1986-10-01), Noguchi et al.
patent: 4744660 (1988-05-01), Noguchi et al.

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