Method and apparatus for measuring material properties using tra

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356359, 356432T, G01B 902

Patent

active

060756020

ABSTRACT:
The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three sub-beams; 3) an imaging system aligned along the optical axis that collects the sub-beams and focuses them onto the sample to form an optical interference pattern that generates a time-dependent response in the sample; 4) a probe laser that generates a probe laser beam that diffracts off the time-dependent response to form a signal beam; 5) a detector that detects the signal beam and in response generates a radiation-induced electronic response; and 6) a processor that processes the radiation-induced electronic response to determine the property of the sample.

REFERENCES:
patent: 5285438 (1994-02-01), Marchand et al.
patent: 5344236 (1994-09-01), Fishman
patent: 5361638 (1994-11-01), Pettersson et al.
patent: 5479256 (1995-12-01), Tami et al.
patent: 5633711 (1997-05-01), Nelson et al.
patent: 5734470 (1998-03-01), Rogers et al.

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