Method and apparatus for measuring lifetime of semiconductor mat

Details Method and apparatus for measuring lifetime of semiconductor mat Method and apparatus for measuring lifetime of semiconductor mat

1991-07-15

1992-08-11

Nguyen, Vinh

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, G01R 3126, G01R 2706

Patent

active

051382555

ABSTRACT:
A method and apparatus measure the lifetime of semiconductor materials having resistivity values within a predetermined measurement range. Carriers are produced within the semiconductor material responsive to incident energy. Microwave energy is radiated from a waveguide onto the semiconductor material to obtain reflected microwave energy. The equivalent distribution circuit characteristics of the waveguide are varied such that a variation of a magnitude of the reflective microwave energy relative to a resistivity of the semiconductor material is substantially linear within the predetemined measurement range. Plural stub tuners are provided within the waveguide to obtain the desired linear characteristics. The lifetime measurement is obtained in accordance with an attenuation of the produced carriers.

REFERENCES:
patent: 3745479 (1973-07-01), Okabe et al.
patent: 3919639 (1975-11-01), Graff et al.
patent: 3939415 (1976-02-01), Terasawa
patent: 4087745 (1978-05-01), Kennedy, Jr. et al.
patent: 4240050 (1980-12-01), Powell
patent: 4739258 (1988-04-01), Schwarz
patent: 4761625 (1988-08-01), Sharma
patent: 4839588 (1989-06-01), Jantsch et al.
patent: 4949034 (1990-08-01), Imura et al.

Affiliated with

Also associated with

Rating

Method and apparatus for measuring lifetime of semiconductor mat does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring lifetime of semiconductor mat, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring lifetime of semiconductor mat will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-349119