Method and apparatus for measuring lifetime of minority carriers

Details Method and apparatus for measuring lifetime of minority carriers Method and apparatus for measuring lifetime of minority carriers

1993-09-17

1995-08-22

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 324 731, 324661, G01R 3100

Patent

active

054443890

ABSTRACT:
A capacitor is connected to an insulating film on a semiconductor wafer. A high-frequency voltage with a bias is applied to the series combination of the semiconductor wafer and the capacitor. The bias voltage is changed stepwise, and the change of the total capacitance is measured. The minority carrier lifetime is calculated from the time-dependent change of the total capacitance.

REFERENCES:
patent: 4891584 (1990-01-01), Kamieniecki
patent: 5225690 (1993-06-01), Sakai
patent: 5233291 (1993-08-01), Kouno
Japanese Patent Laid-Open Gazette, Sho No. 64-65849 (Hei No. 1-65849), 161 E 778.
"The Pulsed MIS Capacitor," Phys. Stat. Sol., vol. (a)89, pp. 13-43, 1985, by J. S. Kang and K. K. Schroeder.

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