Method and apparatus for measuring ion beam collimation, shaping

Details Method and apparatus for measuring ion beam collimation, shaping Method and apparatus for measuring ion beam collimation, shaping

1991-05-15

1993-01-19

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250397, H01J 3730

Patent

active

051809184

ABSTRACT:
A method of measuring collimation of an ion beam used for electrostatically-controlled collimated scanning includes the steps of electrically detecting the ion beam to determine the time-dependent change in the scanning position of the ion beam both at an upstream location and at a downstream location of the ion beam, determining upstream and downstream positions of the ion beam at mutually corresponding times based on the time-dependent change determination, and determining the degree of collimation of the ion beam based on the relationship between the upstream and downstream positions.

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patent: 4785188 (1988-11-01), Mori et al.
patent: 4922106 (1990-05-01), Berrian et al.
patent: 4967380 (1990-10-01), Szajnowski
patent: 5046148 (1991-09-01), Nogami et al.
patent: 5068539 (1991-11-01), Nogami et al.

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