Method and apparatus for measuring internal defects for position

Details Method and apparatus for measuring internal defects for position Method and apparatus for measuring internal defects for position

1991-05-17

1993-03-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356239, G01N 2188

Patent

active

051967162

ABSTRACT:
A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.

REFERENCES:
patent: 3652863 (1972-03-01), Gaskell et al.
patent: 4314763 (1982-02-01), Steigmeier et al.
patent: 4508450 (1985-04-01), Ohshima et al.
patent: 4725139 (1988-02-01), Hack et al.
Patent Abstracts of Japan, vol. 13, No. 413 (E-820) [3761] Sep. 12, 1989 & JP-A-1 151 243 Mitsui Mining & Smelting Co.

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