Method and apparatus for measuring holding distortion

Details Method and apparatus for measuring holding distortion Method and apparatus for measuring holding distortion

2005-10-27

2008-03-11

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C073S800000

Reexamination Certificate

active

07342666

ABSTRACT:
There are carried out a first measurement operation for measuring the shape of a front surface of a sample held in a held state, a second measurement operation for measuring the shape of a back surface of the sample held in the same state, and a third measurement operation for measuring the shape of the back surface of the sample held so as to cause inverse distortion. First data are acquired on the basis of the front surface shape data obtained through the first measurement operation and the back surface shape data obtained through the second measurement operation. Second data are obtained on the basis of the front surface shape data obtained through the first measurement operation and the back surface shape data obtained through the third measurement operation. Holding distortion is determined on the basis of the first and second data.

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Kazuo Hotate et al., Proceedings of Light Wave Sensing, May 1995, pp. 75-82.

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