Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-12-13
2005-12-13
Lee, Hwa (Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S511000
Reexamination Certificate
active
06975405
ABSTRACT:
A system and method for obtaining metrics of a semiconductor chip are provided. A first surface of a chip is positioned on a substantially flat receiving surface. A topography of the receiving surface is measured. A topography of a second surface of the chip is also measured. A relative angle between the receiving surface and the second surface of the chip are determined using the measurements of the receiving surface and the second surface of the chip.
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International Business Machines - Corporation
Lee Hwa (Andrew)
Zilka-Kotab, PC
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