Measuring and testing – Vibration – Resonance – frequency – or amplitude study
Reexamination Certificate
2007-10-02
2007-10-02
Chapman, John E. (Department: 2856)
Measuring and testing
Vibration
Resonance, frequency, or amplitude study
C073S024060, C073S580000, C427S009000
Reexamination Certificate
active
11255781
ABSTRACT:
A device for measuring thickness and/or rate of thickness increase of a film comprises at least one piezoelectric element, and first and second electrodes in contact with the piezoelectric element. A method of measuring thickness and/or rate of thickness increase of a film comprises applying a voltage across a piezoelectric element from a first electrode to a second electrode, thereby causing the piezoelectric element to vibrate, and measuring the rate of vibration of the piezoelectric element. Heat may be applied to the piezoelectric element. The piezoelectric element may be formed of quartz crystal, e.g., IT-cut or near-IT-cut.
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Burr & Brown
Chapman John E.
Tangidyne Corporation
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