Image analysis – Histogram processing – For setting a threshold
Patent
1987-12-14
1990-10-23
Moore, David K.
Image analysis
Histogram processing
For setting a threshold
382 1, 382 22, 382 42, 358107, 356373, G06K 900
Patent
active
049658425
ABSTRACT:
A method and apparatus for measuring feature dimensions uses selective dark-field illumination to illuminate a target from a single direction at a low angle to the plane of the target. Opposing edges of the target elements are distinguished and captured in separate images. The images are filtered using a Gaussian convolution operator and a Laplacian operator. The signs of the filtered images are correlated at various offsets. The relative displacement of the images which produces the maxium correlation value is used to calculate the average dimension of the target elements.
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Pending patent application Ser. No. 06/889,055, filed Jul. 22, 1986, titled "Mask Alignment and Measurement of Critical Dimensions in Integrated Circuits", inventors H. Keith Nishihara and P. Anthony Crossley.
Pending patent application Ser. No. 07/117,704, filed Nov. 5, 1987, titled "Method of Directly Measuring Area and Volume Using Binocular Stereo Vision", inventors P. Anthony Crossley, H. Keith Nishihara, and Neil D. Hunt.
"Image Understanding" Proceedings of a Workshop Held at Washington D.C., Apr. 23, 1981, Science Application, Inc., Report No. SAI-82-391-WA, Lee S. Baumann, Workshop Organizer and Proceedings Editor.
Crossley P. A.
Nishihara H. Keith
Couso Jose L.
Moore David K.
Schlumberger Technologies Inc.
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