Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-07-22
2000-03-21
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 734
Patent
active
060389168
ABSTRACT:
A method and apparatus are provided for measuring energy dissipation during oscillatory operation of an atomic force microscope (AFM). Interaction between the AFM's probe and another medium of interest dissipates energy. This dissipation is reflected by an effect on one or more parameters of probe oscillation such as the amplitude of probe tip oscillation and/or the phase of the probe tip relative to the probe's base. The invention is capable of obtaining an indication of energy dissipated during operation of the AFM by measuring one or more of these parameters and by combining them to produce an energy dissipation signal. In the typical case in which the medium of interest is the sample, an indication is obtained of energy dissipated due to interaction between the probe tip and the sample surface. Obtaining an indication of this energy dissipation can provide information about the effects of this interaction on probe tip wear and can also provide substantial information about sample properties that might not be readily ascertainable through traditional force measurements, if they are ascertainable at all.
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Anczykowski Boris
Cleveland Jason P.
Digital Instruments
Larkin Daniel S.
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