Method and apparatus for measuring dynamic configuration...

Details Method and apparatus for measuring dynamic configuration... Method and apparatus for measuring dynamic configuration...

2007-09-25

2007-09-25

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11078163

ABSTRACT:
A surface of a dynamic object such as a polygon mirror is measured to determine configuration. In measuring the surface configuration, a light is emitted onto the surface, and interference stripes are analyzed to determine the surface configuration. In analysis of the interference stripes, a correct sign for the peak frequency is required so as to measure a configuration at a high precision level without much prior preparation. The correct sign is obtained in a substantially improved manner by using a relationship between the object light that has been reflected by an object to be measured and the reference light that has been emitted from the light source.

REFERENCES:
patent: 4395123 (1983-07-01), Minott
patent: 4457625 (1984-07-01), Greenleaf et al.
patent: 7049578 (2006-05-01), Wada et al.

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