Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2009-10-23
2011-11-22
Lee, Hwa (Department: 2886)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
08064066
ABSTRACT:
In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.
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Baba Shuichi
Nakata Toshihiko
Nomoto Mineo
Watanabe Masahiro
Yoshitake Yasuhiro
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Lee Hwa
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