Method and apparatus for measuring displacement of a sample

Details Method and apparatus for measuring displacement of a sample Method and apparatus for measuring displacement of a sample

2005-07-26

2009-11-03

Lee, Hwa (Andrew) S (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

07612889

ABSTRACT:
In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

REFERENCES:
patent: 4711574 (1987-12-01), Baldwin
patent: 4784490 (1988-11-01), Wayne
patent: 4912530 (1990-03-01), Bessho
patent: 5166751 (1992-11-01), Massig
patent: 5305088 (1994-04-01), Hosoe
patent: 5305089 (1994-04-01), Hosoe
patent: 5404222 (1995-04-01), Lis
patent: 0 281 385 (1988-09-01), None
patent: 0 469 718 (1992-02-01), None
patent: 63-228003 (1988-09-01), None
patent: 04-282402 (1992-10-01), None
patent: 2000-310507 (2000-11-01), None
patent: WO 03/060422 (2003-07-01), None
Frank C. Demarest, “High-Resolution, High-Speed, Low Data Age Uncertainty, Heterodyne, Displacement Measuring Interferometer Electronics”, 1998 IOP Publishing Ltd., pp. 1024-1030.

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