Method and apparatus for measuring displacement having parallel

Details Method and apparatus for measuring displacement having parallel Method and apparatus for measuring displacement having parallel

1991-10-10

1992-11-17

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356374, H01J 314

Patent

active

051650452

ABSTRACT:
A method and apparatus for generating and detecting changes in interference patterns such as may be used to measure small displacements. A collimated beam is diffracted to produce a standing wavefront along a surface. The surface is coincident with the surface of a device which emits a signal in response to changes in the intensity of the wave front. In one embodiment, the diffracting means is a grating and the signal emitting means includes a beam splitter that generates an interference pattern responsive to the intensity of the wave front. In another embodiment, the signal emitting means is a membrane that emits a signal in response to changes in the wavefront. The apparatus and method can be used in applications which include measurement of displacement and measurement of force in which no displacement takes place.

REFERENCES:
patent: 4836681 (1989-06-01), Van Saders et al.
patent: 4979827 (1990-12-01), Matsui
patent: 5075560 (1991-12-01), Greivenkamp et al.

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