Method and apparatus for measuring displacement by using a diffr

Details Method and apparatus for measuring displacement by using a diffr Method and apparatus for measuring displacement by using a diffr

1993-11-02

1994-07-05

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

250237G, 25023114, G01B 902

Patent

active

053272188

ABSTRACT:
A scale having first and second optical gratings on both surfaces of a transparent parallel portion or a scale having a common optical grating with first and second optical gratings on one of the surfaces of the transparent parallel portion is prepared. A beam is radiated on the first optical grating of the scale to cause it to pass through the first optical grating, thereby two-dimensionally inverting an image of the first optical grating. The inverted image is projected on the second optical grating. The inverted image of the image of the first optical grating and the second optical grating are displaced in opposite directions upon movement of the scale. Relative displacement between the inverted image and the second optical grating is larger than the movement amount of the scale, thereby performing displacement detection with high resolution.

REFERENCES:
patent: 3245307 (1966-04-01), de Lang
patent: 3628026 (1971-12-01), Cronin
patent: 3628870 (1971-12-01), Hayamizu
patent: 3630622 (1971-12-01), de Lang
patent: 3768911 (1973-10-01), Erickson
patent: 4879462 (1989-11-01), Stephens
patent: 4976072 (1990-10-01), Tesuji
patent: 4979826 (1990-12-01), Ishizuka et al.
Vasco Ronchi, "Forty Years of History of a Grating Interferometer", Applied Optics, vol. 3, No. 4, pp. 437-451 (Apr. 1964).

Affiliated with

Also associated with

Rating

Method and apparatus for measuring displacement by using a diffr does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring displacement by using a diffr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring displacement by using a diffr will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-799781