Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
2007-08-14
2007-08-14
Lee, Hwa (Andrew) (Department: 2886)
Optics: measuring and testing
By light interference
Spectroscopy
C356S519000, C356S451000
Reexamination Certificate
active
10609223
ABSTRACT:
An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as an output a measured parameter, which is indicative of a parameter of the unknown bandwidth of the spectrum being measured; a reported parameter computing unit adapted to compute a reported parameter of the unknown bandwidth of the spectrum being measured according to the formula: Reported Parameter(“RP”)=A*(Measured Parameter(“MP”))+C, wherein the RP and MP are a different type of parameter and the values of A and C are determined based upon calibration of the optical bandwidth measuring unit MP response for light of known valued of RP.
REFERENCES:
patent: 6317448 (2001-11-01), Das et al.
patent: 6952267 (2005-10-01), Rarac
Cray William C.
Cymer Inc.
Lee Hwa (Andrew)
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