Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-03-02
1989-08-15
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 64, 324 73R, G01R 1900, G01R 3102
Patent
active
048578398
ABSTRACT:
An apparatus for measuring the average characteristics of a semiconductor wafer. The apparatus comprises four electrical contacts removably connected to the wafer at generally equidistant positions on the periphery of the wafer and a flat permanent magnet positioned, adjacent the wafer for applying a substantially uniform magnetic field to one surface of the wafer. The apparatus further comprises control apparatus, connected to each of the electrical contacts for applying current successively to each of four sets of adjacent electrical contacts and measuring the voltage across the opposing set of adjacent electrical contacts in response to each application of current and to each of two sets of opposing electrical contacts and measuring the voltage across the other set of opposing electrical contacts in response to each application of current. As a result, the average dark resistivity, the average dark carrier mobility, and the average dark carrier concentration of the wafer are determined. The apparatus may also be adapted to measure the average light characteristics of a photoconductive semiconductor wafer, wherein the apparatus further comprises a light source for directing light of substantially uniform intensity toward the other surface of the wafer, whereby the average light resistivity, the average light carrier mobility and the average light carrier concentration of the wafer are determined.
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Look David C.
Pimentel Eileen
Burns W.
Eisenzopf Reinhard J.
Wright State University
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