Optics: measuring and testing – With plural diverse test or art
Patent
1994-06-10
1999-03-09
Evans, F. L
Optics: measuring and testing
With plural diverse test or art
356319, 118712, 118715, G01J 342
Patent
active
058808230
ABSTRACT:
A device that eliminates the baseline instability of Atomic Absorption Spectroscopy monitors by utilizing a dual-source, dual-beam optical configuration. The source of one beam, the measuring beam, is light emission from a hollow cathode lamp which is used to determine the atomic vapor density by conventional atomic absorption principles. The second source, the calibration beam, is an emission which has negligible absorption by the atomic vapor, and passes through the same optical path as the measuring beam. For each light source, one beam passes through the processing chamber before its intensity is analyzed. The intensity of a second beam is determined near the light source to provide a reference signal for ratio measurement. Using conventional signal processing, the atomic vapor density, and thus the deposition rate, can be precisely determined despite changes in light source intensity, window transmission and optical alignment.
REFERENCES:
patent: 3734620 (1973-05-01), Cade
Ahearn, Optical Bridge for an Atomic Absorption Rate Monitor and Control System, IBM Technical Disclosure Bulletin. vol. 14, No. 1, Jun. 1971, pp. 148 and 149.
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