Method and apparatus for measuring and monitoring coatings

Details Method and apparatus for measuring and monitoring coatings Method and apparatus for measuring and monitoring coatings

2007-02-13

2007-02-13

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S239000, C250S214100

Reexamination Certificate

active

10971200

ABSTRACT:
There is provided a chip for use in a combination microbalance and optical monitor sensor, the chip comprising a piezoelectric element and electrodes formed on a first surface thereof. At least a portion of the piezoelectric element is translucent. There is also provided a chip comprising a piezoelectric element and electrodes in contact with the piezoelectric element, at least a portion of at least the first electrode being translucent, and at least a portion of the piezoelectric element being translucent. Current can be applied through the electrodes to cause a region of the piezoelectric element to undergo vibration, and light can be passed through a portion of the region of the piezoelectric element which is undergoing the vibration. There is also provided a combination microbalance and optical monitor sensor, comprising a chip as described herein, and a method of simultaneously piezoelectric crystal vibration monitoring and optically monitoring a layer.

REFERENCES:
patent: 2565514 (1951-08-01), Pajes
patent: 3655265 (1972-04-01), Hammond
patent: 4311725 (1982-01-01), Holland
patent: 6616818 (2003-09-01), Gibson
patent: 2006/0144154 (2006-07-01), Ueno et al.

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