Method and apparatus for measuring and evaluating local...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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C324S715000

Reexamination Certificate

active

07088120

ABSTRACT:
A probe device including a cantilever. A probe is attached to the cantilever and is allocated to be opposed to a surface of a sample attached thereto. An apparatus is provided with the probe device, which is capable of carrying out measurement of the sample while switching at a predetermined period two operating modes, a tapping mode for measuring a surface structure of the sample while vibrating the cantilever and a point contact mode for measuring an electrical characteristic of the sample while bringing the probe into contact with the sample.

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Yasuhisa Naito, et al., “Genshi Kanryoku Kenbikyo nl yoru Nano Scale Bunshi Kairo noDenki Dendodo Sokutei” (Measurements of the Electrical Conductivity of SWNT and DNA by AFM), 2002 Nen (Heisei 14 Nen) Shunki Dai 49 Kai Oyo Butsurigaku Kankei Rengo Koenkai Koen Yokoshu, separate vol. 3, The Japan Society of Applied Physics, Mar. 27, 2002, (29a-V-8, p. 1254.
Yoicho Otsuka, et al., “A Nano Tester: A New Technique for Nanoscale Electrical Characterization by Point-Contact Current-Imaging Atomic Force Microscopy”, Japanese Journal of Applied Physics, Jul. 1, 2002, vol. 41, part 2, No. 7A, pp. L742-L744.
Yoicho Otsuka, et al., “Point-Contact Current-Imaging Atomic Force Microscopy: Measurement of Contact Resistance Between Single-Walled Carbon Nanotubes in a Bundle”, Applied Physics Letters, Mar. 24, 2003, vol. 82, No. 12, pp. 1944-1946.

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