Method and apparatus for measuring an interval between two objec

Details Method and apparatus for measuring an interval between two objec Method and apparatus for measuring an interval between two objec

1992-03-16

1994-08-30

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356401, G01B 1102

Patent

active

053432916

ABSTRACT:
A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.

REFERENCES:
patent: 4656347 (1987-04-01), Une et al.
patent: 4988197 (1991-01-01), Ishisashi et al.
Feldman et al., "Application of Zone Plates to Alignment in X-Ray Lithography," Optical Engineering, Mar.-Apr., 1983, vol. 22, No. 2, pg. 203-207.

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