Method and apparatus for measuring a minute pitch

Details Method and apparatus for measuring a minute pitch Method and apparatus for measuring a minute pitch

2007-04-03

2007-04-03

Huber, Paul W. (Department: 2627)

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

C369S053200

Reexamination Certificate

active

10658271

ABSTRACT:
An optical disk11(sample) is laid on a sample moving unit21within a vacuum chamber20. An electron beam radiating mechanism30radiates an electron beam to the optical disk11while moving the optical disk11at a constant speed. Electron detecting means27detects an electron from the optical disk11. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk11. Also, the electron beam radiating mechanism30is provided with a fast deflector33for averaging within a deflection area to measure the track pitch.

REFERENCES:
patent: 5585629 (1996-12-01), Doran et al.
patent: 6307826 (2001-10-01), Katsumura et al.
patent: 6483796 (2002-11-01), Hagiwara
patent: 6919577 (2005-07-01), Watanabe et al.
patent: 8-22794 (1996-01-01), None
patent: 8-329533 (1996-12-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for measuring a minute pitch does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for measuring a minute pitch, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for measuring a minute pitch will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3773218