Method and apparatus for measuring a forming error of an object

Details Method and apparatus for measuring a forming error of an object Method and apparatus for measuring a forming error of an object

1985-11-29

1987-10-06

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

046979271

ABSTRACT:
In a method of measuring the forming error of an object with a shape which is optically smooth and can be expressed mathematically, the reflected light from the object and the reflected light from a reference mirror are made to interfere to form an interference fringe, and the forming error is calculated from the potential distribution of the interference fringe. This calculation of the forming error is performed by calculating the phase distribution W(x,y) of a virtual object beam which is reflected from the measuring surface on the basis of the design values of the shape of the object to be measured when there is no forming error.

REFERENCES:
Balasubramanian et al, "A New Approach to High Precision Phase Measurement Interferometry", Proc. SPIE, vol. 230, pp. 180-190, 1980.
Akira Ono and J. C. Wyant, "Aspherical Mirror Testing Using a CGH with Small Errors", Applied Optics, vol. 24 (1985) 560.
T. Yatagai and T. Kanou, "Aspherical Surface Testing with Shearing Interferometer Using Fringe Scanning Detection Method", Optical Engineering, vol. 23 (1984) p. 357.
H. Bruning, et al "Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses", Applied Optics, vol. 13 (1974) 2693.

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