Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1993-12-22
1996-01-23
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356 72, 73 81, G01B 902
Patent
active
054869242
ABSTRACT:
Light is focused on an interface between a transparent probe and a surface to be analyzed. The probe is lowered onto the surface using a computer-controlled actuator. Light reflected from the surface of the probe which is closest to the surface and the surface itself recombines, producing interference effects from the spacing between the probe and the surface over a 2-dimensional area. Since the shape of the probe in known beforehand, the profile of the surface can be readily calculated from the 2-dimensional measurement of the spacing between the probe and the surface. This surface profile indicates the roughness of the surface. The surface hardness and other surface properties can be measured by pressing the probe onto the surface. The contact load between the probe and the surface is detected by a load cell. The force with which the probe is being pressed onto the surface is measured using the load cell. The surface profile can continue to be measured interferometrically while it is being deformed by the probe. The measurement of surface deformation as a function of contact pressure allows the measurement of surface hardness while causing a minimum amount of damage to the surface.
REFERENCES:
patent: 2830490 (1958-04-01), Pellegrini
patent: 3421079 (1969-01-01), Bennett et al.
patent: 4092068 (1978-05-01), Lucas et al.
patent: 4293224 (1981-10-01), Gaston et al.
patent: 4593368 (1986-06-01), Fridge et al.
patent: 4627733 (1986-12-01), Wada
patent: 4630926 (1986-12-01), Tanaka et al.
patent: 4639139 (1987-01-01), Wyant et al.
patent: 4650330 (1987-03-01), Fujita
patent: 4807991 (1989-02-01), Carew
patent: 4820051 (1989-04-01), Yanagisawa et al.
patent: 4832489 (1989-05-01), Wyant et al.
patent: 4854708 (1989-08-01), Kafri et al.
patent: 4878114 (1989-10-01), Huynh et al.
patent: 4931630 (1990-06-01), Cohen et al.
patent: 4948251 (1990-08-01), Kondo
patent: 5028136 (1991-07-01), Murarka et al.
patent: 5280340 (1994-01-01), Lacey
G. L. Best et al.; "Precise Optical Measurements of Slider Dynamics"; IEEE Transactions on Magnetics, vol. MAG-22, No. 5, Sep. 1986, pp. 1017-1018.
T. Ohkubo et al.; "Accurate Measurement of Gas-lubricated Slider Bearing Separation Using Visible Laser Interferometry"; Journal of Triboloby Transactions of the ASME, Oct. 1987, pp. 1-6.
D. L. Lipschutz; "Dynamic Measurement of Small Separations by a Light Interference Method"; IEEE: Proceedings of the International Conference on Magnetic Recording, London, Jul. 1964, pp. 87-90.
W. N. Hansen; "Electric Fields Produced by the Propagation of Plane Coherent Electromagnetic Radiation in a Stratified Medium"; Journal of the Optical Society of America, vol. 58, No. 3, Mar. 1968, pp. 380-390.
K. Tanaka et al.; "Measurements of Transient Motion of Magnetic Disk Slider"; IEEE Transactions on Magnetics, vol. MAG-20, No. 5, Sep. 1984, pp. 924-926.
J. M. Fleischer et al.; "Infrared Laser Interferometer for Measuring Air-Bearing Separation", IBM J. Res. Develop., Nov. 1974, pp. 529-533.
A. Nigam; "A Visible Laser Interferometer for Air Bearing Separation Measurement to Submicron Accuracy"; Journal of Lubrication Technology, Transactions for the ASME; vol. 104, Jan. 1982, pp. 60-65.
Y. Mizoshita et al.; "Dynamic Characteristics of a Magnetic Head Slider"; IEEE Transactions on Magnetics; vol. MAG-21, No. 5, Sep. 1985, pp. 1509-1511.
C. Lin; "Techniques for the Measurement of Air-Bearing Separation-A Review"; IEEE Transactions on Magnetics, vol. MAG-9, No. 4, Dec. 1973, pp. 673-677.
C. Lin et al.; "An Application of White Light Interferometry in Thin Film Measurements"; IBM J. Res. Dev. May 1972, pp. 269-276.
G. L. Best; "Comparison of Optical and Capacitive Measurements of Slider Dynamics"; IEEE Transactions on Magnetics, vol. MAG-23, No. 5, Sep. 1987, pp. 3453-3455.
S. Yamamoto et al.; "Real Time Observation of Head-To-Medium Interface in Flexible Perpendicular Magnetic Recording Disc System"; publication and date unknown.
Sales Brochure; ProQuip FM8801; publication date unknown.
Sales Brochure; PPL Aautomatic Digital Flying Height Tester; publication date unknown.
Y. Mizoshita et al.; "Dynamic Characteristics of a Magnetic Head Slider"; IEEE Transactions on Magnetics, vol. MAG-21, No. 5, Sep. 1985, pp. 1509-1511.
M. Mizukawa et al.; "Study on Spherical Foil Bearing"; Bulletin of JSME, vol. 28, No. 243, Sep. 1985, pp. 2105-2111.
Sales Brochure; Dynamic Flying Height Tester; Phase Metrics; 6 pages; publication date unknown.
C. Lacey et al,; "A New Method for Measuring Flying Height Dynamically"; Phase Metrics; 1992, pp. 1-6.
Epperson Dennis H.
Phase Metrics
Turner Samuel A.
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