Method and apparatus for measurement of mobile charges with a co

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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2504922, G01R 3126, G01R 3128

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active

057676933

ABSTRACT:
The surface of a wafer is charged with corona passing through a screen. The screen is part of a feedback loop that forces a constant corona current. This results in the potential of the wafer surface following the potential of the screen. This allows contemporaneous measurement of the surface charge and potential that are used to measure mobile charge in an oxide layer on the wafer.

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