Method and apparatus for mapping of wafers located inside a...

Details Method and apparatus for mapping of wafers located inside a... Method and apparatus for mapping of wafers located inside a...

2006-03-21

2006-03-21

Porta, David (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C220S221000

Reexamination Certificate

active

07015492

ABSTRACT:
Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.

REFERENCES:
patent: 5721607 (1998-02-01), Ota
patent: 5995234 (1999-11-01), Nishi
patent: 6013920 (2000-01-01), Gordon et al.
patent: 6452503 (2002-09-01), Weiss

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