Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1995-08-22
1997-09-30
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
427596, 505732, 156345, 216 37, 216 65, 118729, 118730, C23C14600, H01L 3924
Patent
active
056722109
ABSTRACT:
The method for manufacturing superconducting elements according to the present invention include the following steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to face a surface of the target, wherein the target comprises a target material of a complex oxide superconducting compounds; (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material so that the target material is deposited onto a surface of the substrate, wherein the surface of the substrate maintains the position facing the surface of the target; and (c) fabricating the surface of the target material layer on the substrate to form a superconducting element by irradiating a laser beam to the surface of the substrate, without removing the substrate from the chamber. The laser beam of step (b) used to irradiate may traverse along a first optical path, and the laser beam of step (c) of fabricating the surface used for the target may traverse along a second optical path, which is not consistent with the first optical path.
REFERENCES:
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Wu, et al. Optimization of depositing Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub..delta. superconducting thin films by excimer laser ablation with CO.sub.2 laser-heated substrates, Physica C 195, (Jan. 29, 1992) pp. 241-257.
Bartholomew, Low Temperature Synthesis of High-Tc Superconducting Thin Films by Laser Assisted Reactive Deposition, Materials Research Society Extended Abstracts of High Temp Superconductors II Symposium pp. 81-84, Apr. 5-9, 1988 Reno, Nevada.
Chu, Supercond. Sci. Technol. 3 (1990) 497-499.
Tabata, Jpn. J. Appl. Phys. vol. 31 (1992) pp. 2968-2970 Part 1, No. 9B, Sep. 1992.
Kolinsky et al. `Laser deposition and patterning of high temperature superconducting thin films` GEC JOURNAL OF RESEARCH (1988), vol. 6, No. 3, pp. 162-169.
Zheng et al. `Laser patterning and critical current measurements of submicrometer lines of Y-Ba-Cu-O` APPLIED PHYSICS LETTERS, (Sep. 4, 1989), vol. 55, No. 10, p. 1046.
Itozaki Hideo
Moto Akihiro
Nagaishi Tatsuoki
Bueker Richard
Sumitomo Electric Industries Ltd.
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