Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2002-03-29
2008-08-19
Everhart, Caridad (Department: 2891)
Semiconductor device manufacturing: process
With measuring or testing
C438S765000, C118S665000, C118S677000, C257SE21552, C257SE21529
Reexamination Certificate
active
07413914
ABSTRACT:
A process of manufacturing a semiconductor device utilizing a thermo-chemical reaction is started based on preset initial settings, a state function of an atmosphere associated with the thermo-chemical reaction is measured, a state of the atmosphere and a change thereof are analyzed based on measurement data obtained by the measurement, and then, analysis data obtained by the analysis is fed back to a manufacturing process.
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Notification of Reasons for Rejection in JP Patent App. No. 2001-102459, Notice Date of Jun. 12, 2006.
Notification of Reasons for Rejection in JP Patent App. No. 2001-102459, Notice Date of Sep. 7, 2006.
Nakamura Mitsutoshi
Ushiku Yukihiro
Everhart Caridad
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
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