Method and apparatus for manufacturing plate-like structure

Details Method and apparatus for manufacturing plate-like structure Method and apparatus for manufacturing plate-like structure

2009-09-01

2011-11-15

Ewald, Maria Veronica (Department: 1744)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C425S810000, C264S001330, C264S293000

Reexamination Certificate

active

08057214

ABSTRACT:
A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.

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Stephen Y. Chou, et al., “Imprint of sub-25 nm vias and trenches in polymers,” App. Phys. Lett., vol. 67, No. 21 Nov. 20, 1995, pp. 3114-3116.
L. Malaquin, F. Carcenac, C. Vieu, M. Mauzac, Using polydimethylsiloxane as a thermocurable resist for a soft imprint lithography process, Microelectronic Engineering, vol. 61-62 (2002), pp. 379-384.

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