Method and apparatus for manufacturing needle shaped materials a

Details Method and apparatus for manufacturing needle shaped materials a Method and apparatus for manufacturing needle shaped materials a

1994-05-19

1996-04-23

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 60, 427583, 427584, 427596, 118723FI, H01J 130, H01J 902

Patent

active

055098436

ABSTRACT:
A method and apparatus exists for manufacturing needle-shaped materials for use as microemitters, wherein a light beam output from a light source is split into a plurality of beams and the split light beams are focused by an optical system and directed into a chamber having a gas containing electroconductive molecules. The electroconductive molecules are degraded through excitation by the beams directed into the chamber to deposit needle-shaped materials on a substrate disposed in the chamber. By so doing, a plurality of needle-shaped materials are simultaneously produced on the substrate in accordance with a corresponding number of beams obtained through splitting.

REFERENCES:
patent: 4784963 (1988-11-01), Krimmel et al.
patent: 4876112 (1989-10-01), Kaito et al.
patent: 5064396 (1991-11-01), Spindt
patent: 5344352 (1994-09-01), Horne et al.
Journal of Vacuum Science & Technology, Part B, vol. 10, No. 6, Nov.-Dec. 1992, pp. 2743-2748, T. H. P. Chang, et al., "Arrayed Miniature Electron Beam Columns for High Throughput Sub-100 nm Lithography".
Journal of Vacuum Science & Technology, Part B, vol. 6, No. 1, Jan.-Feb. 1988, pp. 477-481, H. W. P. Koops, et al., "High-Resolution Electron-Beam Induced Deposition".
Patent Abstracts of Japan, vol. 10, No. 303 (C-378), Oct. 16, 1986, JP-A-61 118 137, Jun. 5, 1986.

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