Specialized metallurgical processes – compositions for use therei – Processes – Producing solid particulate free metal directly from liquid...
Reexamination Certificate
1999-12-23
2004-01-13
Wyszomierski, George (Department: 1742)
Specialized metallurgical processes, compositions for use therei
Processes
Producing solid particulate free metal directly from liquid...
C075S334000, C075S340000
Reexamination Certificate
active
06676726
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method and an apparatus for manufacturing minute metallic spheres suitably used for forming a ball bump on an electrode of a semiconductor device, a printed circuit board, or the like.
2. Description of the Related Art
As methods of manufacturing minute metallic spheres within low-melting temperature, there are atomization method and a method of obtaining metallic spheres by dipping a metallic piece made into a predetermined volume in advance, in a heated liquid.
Besides, in the method described in Japanese Patent Application Laid-open No. 4-74801, a molten metal is extruded from very fine particles in a liquid heated to a temperature more than the melting point of the metal.
Although a large quantity of metallic particles can be obtained for a short time by the atomization method, it is difficult to make the shapes of the particles uniform in sphere and into an aimed size, and the yield becomes very bad. By the method of dropping a metallic piece in the heated liquid, it can be made into a substantially complete sphere by surface tension. But, for making the sizes of metallic pieces to be dropped, uniform in advance, there are some required processes of press-punching a plate made very thin by rolling or the like, or of making into a fine line with a die or the like and accurately cutting with a cutter or the like.
Besides, in that described in the Japanese Patent Application Laid-open No. 4-74801, the interior of a vertical tube is filled with a natural oil or the like, and a zone or a region having a temperature range more than the melting point of a metal is provided by a heater attached to the upper portion of the vertical tube. And, a low-melting alloy supply tube to which a fine grating is attached in that region, is stood such that the fine grating is at the lower position. A lump of a low-melting alloy is inserted in the low-melting alloy supply tube and molten, and an inert gas is fed through the upper portion of the low-melting alloy supply tube. Molten alloy is extruded from the fine grating by the pressure of the gas and made into particles, and they become spherical shape by passing through the temperature inclination of the vertical tube.
However, in the method described in this official gazette, the relation between the grating size and the pressurizing force, or the like, is unknown. In any case, the shape of a particle is made by the surface tension in a delicate balance relation to such a factor. In this method, so-called duplex grain can not be avoided.
SUMMARY OF THE INVENTION
In consideration of such an actual condition, the present invention aims to provide a method and an apparatus for manufacturing minute metallic spheres, capable of accurately and efficiently manufacturing minute metallic spheres of a predetermined size.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, wherein a minute metallic sphere is formed by injecting a molten metal in a gauger of a predetermined volume to measure, and discharging the measured molten metal from the gauger to solidify.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, including a step of heating and melting, a metal to form a metallic sphere, and injecting the molten metal in a gauger, a step of taking by rubbing the molten metal injected in said gauger by a predetermined volume to measure, and a step of discharging the measured molten metal from the gauger, and cooling the molten metal to a temperature less than the melting point to solidify.
A manufacturing apparatus of minute metallic spheres of the present invention is a manufacturing apparatus of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, comprising a heating means for heating and melting a metal to form a metallic sphere, a measurement means for measuring the injected molten metal into a predetermined volume, and a cooling means for cooling said molten metal discharged from said gauger, to a temperature less than the melting point.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, wherein a minute metallic sphere is formed by discharging a molten metal from an opening portion, and dividing said molten metal discharged from said opening portion into each predetermined volume.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, having a step of heating and melting a metal to form a metallic sphere, and discharging the molten metal from an opening portion, a step of dividing said molten metal discharged from said opening portion into each predetermined volume, and a step of cooling said molten metal divided to a temperature less than the melting point to solidify.
A manufacturing apparatus of minute metallic spheres of the present invention is a manufacturing apparatus of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, comprising a heating means for heating and melting a metal to form a metallic sphere, a means for discharging the molten metal from a predetermined opening portion, a division means for dividing said molten metal having passed through said opening part, and a cooling means for cooling said molten metal divided by said division means, to a temperature less than the melting point.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, including a step of heating and melting a metal to form a metallic sphere, and injecting the molten metal in a measurement means by pressurizing, a step of cutting by rubbing the molten metal injected in the measurement means by a predetermined volume to measure, and a step of discharging the measured molten metal from the measurement means by a fluid pressure, and cooling the molten metal to a temperature less than the melting point to solidify.
A manufacturing apparatus of minute metallic spheres of the present invention is a manufacturing apparatus of minute metallic spheres for manufacturing minute metallic spheres of a predetermined size, comprising a heating means for heating and melting a metal to form a metallic sphere, a metal supply means for pressurizing and supplying the molten metal by the heating means, a measurement means supported so as to be rotatable relatively to said metal supply means, for measuring the injected molten metal into a predetermined volume by its rotational action, and a cooling means for cooling said molten metal discharged from said measurement means, to a temperature less than the melting point.
A manufacturing apparatus of minute metallic spheres of the present invention is a manufacturing apparatus of minute metallic spheres having a measurement unit in an upper portion of an oil vessel disposed vertically, for forming a minute metallic sphere by solidifying a molten metal discharged from this measurement unit, in an oil, wherein it has one or a plurality of cooling means in the lower part of said measurement unit, and a lower portion of said oil vessel is cooled.
A manufacturing method of minute metallic spheres of the present invention is a manufacturing method of minute metallic spheres having a measurement unit in an upper portion of an oil vessel disposed vertically, for forming a minute metallic sphere by solidifying a molten metal discharged from this measurement unit, in an oil, wherein one or a plurality of regions in the lower part of said oil vessel is cooled, and the oil in each regio
Endo Michio
Tanaka Masamoto
Connolly Bove & Lodge & Hutz LLP
Nippon Steel Corporation
Wyszomierski George
LandOfFree
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