Method and apparatus for manufacturing liquid drop ejecting...

Details Method and apparatus for manufacturing liquid drop ejecting... Method and apparatus for manufacturing liquid drop ejecting...

2006-09-19

2006-09-19

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

Utilizing shield

C451S038000, C347S020000, C216S002000, C216S041000, C216S052000, C216S067000

Reexamination Certificate

active

07108584

ABSTRACT:
The method and apparatus manufacture a liquid drop ejecting head. The method and apparatus blast particles on a substrate having on an upper layer a patterned mask layer made of an organic material and on a lower layer a driver circuit for ejecting a liquid drop to thereby perform an etching process on parts of the substrate exposed from the mask layer. The etching process is performed in an ionic atmosphere ionized with a polarity opposite to a charged polarity generated in the substrate when the substrate is subjected to etching.

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