Method and apparatus for manufacturing high-purity silicon rods

Details Method and apparatus for manufacturing high-purity silicon rods Method and apparatus for manufacturing high-purity silicon rods

1978-03-02

1979-04-17

Silverberg, Sam

Coating processes

Electrical product produced

Welding electrode

264 81, 156611, 427 86, 423349, 423350, 118 495, B05D 512

Patent

active

041501683

ABSTRACT:
A method of manufacturing high-purity silicon rods by subjecting a silicon compound to pyrolysis on a plurality of rod-shaped high-purity silicon carrier members which have been red-heated by directly passing an electric current therethrough thereby depositing high-purity silicon thereon, characterized in that monosilane supplied into a pyrolysis container is subjected to pyrolysis or thermal decomposition on said red-heated carrier members while insulating the radiant heat between said red-heated carrier members along the overall length thereof.

REFERENCES:
patent: 3011877 (1961-12-01), Schweickert
patent: 3053638 (1962-09-01), Reiser
patent: 3099534 (1963-07-01), Schweickert
patent: 3147141 (1964-09-01), Ishizuka

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