Method and apparatus for manufacturing head drums coated with di

Details Method and apparatus for manufacturing head drums coated with di Method and apparatus for manufacturing head drums coated with di

1995-08-15

1997-03-18

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118728, C23C 1600

Patent

active

056118627

ABSTRACT:
An apparatus and method for simultaneously coating a large number of cylindrical substrates employs plural pairs of power electrode and the ground electrodes connected with an independent power sources in order to promote the uniform coating of the substrates. The apparatus uses a high-frequency plasma chemical deposition method and comprises a power supply system, a gas supply system, and a vacuum system. These systems are operatively connected to a reactor. The reactor comprises plural electrodes, workpiece supports, insulators, annular ground electrodes, gas outlets and gas supply means. The method comprises a step for stacking the substrates or the workpiece supports and combining them with the electrodes, a step for introducing gas to the reactor, a step for applying power to the power electrodes, and a step or maintaining the pressure in the reactor constant.

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patent: 5217560 (1993-06-01), Kurono et al.
Thin Solid Films, vol. 212, p. 240-244, 1992, H. Nakaue, et al., "Applications Of Diamond-Like Carbon Films To Electronic Components".
Nikkei Electronics Asia, pp. 40-41, Sep. 1993, S. Miyoshi, "10 Japanese, European VCR Makers Move To Standardize Digital HDTV VCR For Homes".

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