Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent
1999-02-18
2000-12-19
Mills, Gregory
Coating apparatus
Control means responsive to a randomly occurring sensed...
Temperature responsive
118726, C23C 1426, C23C 1454
Patent
active
061622966
ABSTRACT:
The method and the apparatus of manufacturing the I-III-VI.sub.2 type chalcopyrite semiconductor thin films of the present invention control the film composition easily and improve the reproducibility of films by monitoring the composition of the films during forming the films. The apparatus comprise the substrate holder and heater which are in the vacuum chamber and Mo-coated glass substrate on which Cu(In,Ga)Se.sub.2 films are deposited. The change of the substrate temperature is monitored by the use of a heating element to heat the substrate by releasing a certain quantity of heat, a mechanism of measuring a temperature of the heated substrate. The change of power supplied is monitored by the use of a power source for the heating element to keep the substrate at a certain temperature and a mechanism of monitoring the change of the power supplied to the heating element. The changes in substrate temperature or power supplied can be correlated to the film composition.
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Kohara Naoki
Negami Takayuki
Nishitani Mikihiko
Wada Takahiro
MacArthur Sylvia R
Mills Gregory
Mitsushita Electric Industrial Co., Ltd.
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