Method and apparatus for manufacture of semiconductor devices

Details Method and apparatus for manufacture of semiconductor devices Method and apparatus for manufacture of semiconductor devices

1996-05-17

1998-04-14

Trammell, James P.

Boots, shoes, and leggings

36446819, 36447801, 36447816, 414222, 414940, B65G 4907

Patent

active

057400520

ABSTRACT:
A semiconductor device manufacturing apparatus and method includes a reticle library for accommodating therein a first reticle cassette, a cassette table for holding thereon a second reticle cassette of a shape different from that of the first reticle cassette, a first opening and closing mechanism for opening/closing the first reticle cassette in accordance with a predetermined first sequence, a second opening and closing mechanism for opening/closing the second reticle cassette in accordance with a predetermined second sequence different from the first sequence, a reticle stage for holding a reticle as unloaded from the first reticle cassette, for use of the reticle in the apparatus, a reticle hand for conveying a reticle as unloaded from the reticle stage, and a controller operable to discriminate one of the first and second reticle cassettes into which one cassette the reticle as unloaded from the reticle stage is to be accommodated, on the basis of reticle control information. The controller is also operable to move, through the reticle hand, the reticle into the first reticle cassette as being opened by the first opening and closing mechanism when the controller concludes that the reticle is to be accommodated in the first reticle cassette. The controller is also operable to move, through the reticle hand, the reticle into the second cassette as being opened by the second opening and closing mechanism when the controller concludes that the reticle is to be accommodate in the second reticle cassette.

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