Coating apparatus – Gas or vapor deposition – With treating means
Patent
1986-11-24
1988-03-08
Bueker, Richard R.
Coating apparatus
Gas or vapor deposition
With treating means
427 38, 427 39, C23C 1648
Patent
active
047293411
ABSTRACT:
There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylindrical members form narrow passages which communicate with the inner chamber. At least one reaction gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylindrical members. The plasma can be formed by using either microwave energy or radio frequency energy. More particularly disclosed is a method and apparatus for making electrophotographic drums.
REFERENCES:
patent: 4265730 (1981-05-01), Hirose
patent: 4466380 (1984-08-01), Jansen
patent: 4517223 (1985-05-01), Ovshinsky
patent: 4526805 (1985-07-01), Yoshizawa
Bjornard Erik J.
Doehler Joachim
Fournier Eugene W.
Johncock Annette G.
Bueker Richard R.
Energy Conversion Devices Inc.
Goldman Richard M.
Siskind Marvin S.
LandOfFree
Method and apparatus for making electrophotographic devices does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for making electrophotographic devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for making electrophotographic devices will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-226840