Method and apparatus for making electrophotographic devices

Coating apparatus – Gas or vapor deposition – With treating means

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427 38, 427 39, C23C 1648

Patent

active

047293411

ABSTRACT:
There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylindrical members form narrow passages which communicate with the inner chamber. At least one reaction gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylindrical members. The plasma can be formed by using either microwave energy or radio frequency energy. More particularly disclosed is a method and apparatus for making electrophotographic drums.

REFERENCES:
patent: 4265730 (1981-05-01), Hirose
patent: 4466380 (1984-08-01), Jansen
patent: 4517223 (1985-05-01), Ovshinsky
patent: 4526805 (1985-07-01), Yoshizawa

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