Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-02-09
2009-02-10
Stultz, Jessica T (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S238000
Reexamination Certificate
active
07489433
ABSTRACT:
A light beam scanner may include a polymeric material and a soft magnetic material.
REFERENCES:
patent: 2002/0050744 (2002-05-01), Bernstein et al.
patent: 2004/0075522 (2004-04-01), Kato et al.
Hakan Urey, “Retinal Scanning Displays”, Encyc. of Optical Engineering, 2003, pp. 2445-2257, Marcel Dekker, Inc., New York, United States.
Hakan Urey, “MEMS Scanners for Display and Imaging Applications”, submitted to Photonics East, 2004, pp. 1-9.
Hakan Urey et al., “Scanner design and resolution tradeoffs for miniature scanning displays”, SPIE Proc. of Conference on Flat Display Technology and DIsplay Metrology, 1999, pp. 60-68, vol. 3636, San Jose, United States.
Hakan Urey et al., “MEMS Rastor Correction Scanner for SXGA resolution Retinal Scanning Display”, Proceedings of SPIE Proc. of MOEMS Display and Imaging System II, SPIE, 2003, pp. 106-114, vol. 4985.
Alexander Wolter et al., “MEMS microscanning mirror for barcode reading: from development to production”, SPIE Proc. of MOEMS Display and Imaging Systems II, 2004, pp. 32-39, vol. 5348, SPIE, Bellingham, WA United States.
Harold Schenk et al., “Light processing with electrostatically driven micro scanning mirrors and micro mirros arrays”, SPIE Proc. of MOEMS Display and Imaging Systems II, 2004.
Kai-Uwe Roscher et al., “Low cost projectition device with a 2D resonant microscanning mirror”, SPIE Proc. of MOEMS Display and Imaging Systems II, 2004, pp. 22-31, vol. 5348, SPIE, Bellingham, WA United States.
Robert A. Conant et al., “A raster-scanning full-motion video display using polysilicon micromachined mirrors”, Proc. of the 1999 Int. Conf. on Solid-State Sensors and Actuators (Transducer '99), 1999, pp. 376-379, Elsevier Science S.A., Sendai, Japan.
Jin-Ho Lee et al., “Design and fabrication of scanning mirror for laser display”, Sensors and Actuators A, 2002, pp. 223-230, vol. 96, Elsevier Science B.V.
David L. Dickensheets et al., “Silicon-micromachined scanning confocal optical microscope”, Journal of Microelectromechanical Systems, 1998, pp. 38-47, vol. 7, IEEE.
Caglar Ataman, “Design, Modeling and Characterization of Electrostatically Actuated Microscanners”, M.S. Thesis, 2004, pp. 1-93.
Hung-Yi Lin et al., “A Rib-reinforced micro torsional mirror driven by electrostatic torque generators”, Sensors and Actuators A, 2003, pp. 1-9, vol. 105, Elsevier Science B.V., Taiwan.
Thomas G. Bifano et al., “Microelectromechanical Deformable Mirrors”, IEEE Journal of Selected Topics in Quantum Electronics, 1999, pp. 83-89, vol. 5 No. 1.
Sunghoon Kwon et al., “A High Aspect Ratio 2D Gimbaled Microscanner with Large Static Rotation”, IEEE/LEOS Optical MEMS, 2002, pp. 149-150.
Daesung Lee et al., “Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability”, Sensors and Actuatrors A (to be published), 2003.
Jack William Judy, “Batch-fabricated Ferromagnetic Microactuators with Silicon Flexures”, PhD Thesis, 1996.
Jonathon J. Bernstein et al., “Electromagnetically actuated mirror arrays for use in 3-D optical switching applications”, Journal of Microelectromechanical Systems, 2004, pp. 526-535,vol. 13, No. 3.
B. Wagner et al., “Microfabricated actuator with moving permanent magnet”, IEEE, 1991, pp. 27-32.
Hyoung J. Cho et al., “A Bi-directional magnetic microactuator using electroplated permanent magnet arrays”, Journal of Microelectromechanical Systems, 2002, pp. 78-84, vol. 11, No. 1.
Jack William Judy et al., “Magnetic microactuation of Polysilicon Flexure Structures”, Journal of Microelectromechanical Systems, 1995, pp. 162-169, vol. 4, No. 4.
Chang Liu, “Micromachined Magnetic Actuators Using Electroplated Permalloy”, IEEE Transactions on Magnetics, 1999, pp. 1976-1985, vol. 35, No. 3.
Chang Liu et al., “Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control”, Sensors and Actuators, 1999, pp. 190-197, vol. 78.
S. Schweizer et al., “Thermally actuated optical microscanner with large angle and low consumption”, Sensors and Actuators, 1999, pp. 470-477, vol. 76.
Minoru Sasaki et al., “Optical scanner on a three-dimensional microoptical bench”, Journal of Lightwave Technology, 2003, pp. 602-608, vol. 21, No. 3, IEEE, Japan.
Wen-Mei Lin et al., “Two-dimensional microscanner actuated by PZT thin film”, SPIE Proc. Of Device and Process Technologies for MEMS and Microelectronics, 1999, pp. 133-140, vol. 3892, Australia.
F. Filhol et al, “Piezoelectric micromirrors for fast optical scanning with large angular deflection”, IEEE/LEOS International Conference on Optical MEMS and Their Applications, 2004, Japan.
Harold Schnek et al, “Large deflection micromechanical scanning mirrors for linear scans and pattern generation”, Journal of Selected Topics in Quantum Electronics, 2000, pp. 715-722, vol. 6, No. 5.
Hakan Urey et al, “Vibration mode frequency of formulae for micromechanical scanners”, Journal of Micromechanics and Microengineering, 2005, pp. 1713-1721, vol. 15, IOP Publishing LTD, United Kingdom.
Karl Vollmers et al, “High Strength Rare Earth-Iron-Boron Printed Magnets Used In A Long Throw-High Force Electromagnetic Actuator With Microfabricated Coils”, Proc. IEEE MEMS, 2003, pp. 60-63, IEEE, Japan.
Laure K. Lagorce et al, “Magnetic and Mechanical Properties of Micromachined Strontium Ferrite/Polyimide Composites”, Journal of Microelectromechanical Systems, 1997, pp. 307-312, vol. 6, No. 4, IEEE, United States.
Laure K. Lagorce et al, “Magnetic Microactuators Based on Polymer Magnets”, Journal of Microelectromechanical Systems, 1999, pp. 2-9, vol. 8, No. 1, IEEE.
Chong H. Ahn et al., “A Planer variable reluctance magnetic micromotor with full integrated stator and wrapped coils”, IEEE Micro Electro Mechanical Systems Workshop Proceedings (MEMS 1993), 1993, pp. 1-6, IEEE, United States.
William P. Taylor et al., “Electroplated soft magnetic materials for microsensors and microactuators”, International Conference on Solid-State Sensors and Actuators, 1997, pp. 1445-1448, IEEE, United States.
Jean-Marie Quemper et al, “Permalloy electroplating through photoresist molds”, Sensors and Actuators, 1999, pp. 1-4, vol. 74, France.
Hakan Urey et al., “FR4 (PCB) Polymer Scanners”, PowerPoint, 2006, slides 1-49, Koc University.
Ergeneman Olgac
Urey Hakan
Microvision Inc.
Sahle Mahidere S
Stultz Jessica T
Wills Kevin D.
LandOfFree
Method and apparatus for making and using 1D and 2D magnetic... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for making and using 1D and 2D magnetic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for making and using 1D and 2D magnetic... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4122559