Method and apparatus for making a micro device

Details Method and apparatus for making a micro device Method and apparatus for making a micro device

1997-05-15

1999-06-15

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430 22, G03F 900

Patent

active

059120940

ABSTRACT:
A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180.degree. to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.

REFERENCES:
patent: 5726480 (1998-03-01), Pfister
Pister et al., "Microfabricated Hinges," v. 33, Sensors and Actuators A, pp. 249-256, 1992.

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