Method and apparatus for making a metal to semiconductor contact

Details Method and apparatus for making a metal to semiconductor contact Method and apparatus for making a metal to semiconductor contact

1975-10-22

1977-05-03

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 60C, G01R 106, G01R 3126, G01R 2726

Patent

active

040217353

ABSTRACT:
A method and apparatus for making a reproducible, pressure and surface coant metal to semiconductor contact for voltage capacitance measurements on semiconductor samples with mercury as the metal component, wherein the mercury is pressed through a contact tubule having a constant diameter against a semiconductor surface by means of a movable pressure piston under a reproducible constant pressure from a supply vessel.

REFERENCES:
patent: 3794912 (1974-02-01), Severin et al.

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