Oscillators – Solid state active element oscillator – Significant distributed parameter resonator
Reexamination Certificate
2011-01-11
2011-01-11
Kunemund, Robert M (Department: 1714)
Oscillators
Solid state active element oscillator
Significant distributed parameter resonator
C331S1160FE, C331S154000
Reexamination Certificate
active
07868708
ABSTRACT:
The method of making uniform low-stress crystals includes immersing a seed crystal held at a temperature under its melting point in a melt in a crucible and drawing it from the melt. The crystal and/or melt are rotated relative to each other and a planar phase boundary surface is maintained between them by detecting a surface temperature of the melt and/or crystal and controlling temperature fluctuations by increasing or decreasing the rotation speed. The single crystals obtained by this method have a diameter ≧50 mm and no visible growth strips in a fishtail pattern when a 2-mm thick sample is observed between crossed polarizers. These crystals have an index of refraction uniformity Δn of <1 ppm and a stress birefringence of <1 nm/cm at 193 nm, so that optical elements suitable for DUV lithography can be made from them.
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Ackermann Lothar
Dupre Klaus
Parthier Lutz
Rytz Daniel
Wehrhan Gunther
Kunemund Robert M
Rao G. Nagesh
Schott AG
Striker Michael J.
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