Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1994-08-15
1997-09-23
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
056707126
ABSTRACT:
A method and apparatus of magnetic force control for a scanning probe, wherein a first magnetic source having a magnetic moment is provided on the scanning probe and a second magnetic source is disposed external to the scanning probe to apply a magnetic field in a direction other than parallel, and preferably perpendicular, to the orientation of the magnetic moment, from the second magnetic source to the first magnetic source to produce a torque related to the amplitude of the applied magnetic field acting on the probe. By controlling the amplitude of the applied magnetic field, the deflection of the scanning probe is maintained constant during scanning by the scanning probe. An output signal related to the amplitude of the magnetic field applied by the second magnetic source is produced and is indicative of a surface force applied to the probe. The invention can also be used to apply large forces during scanning for applications such as nanolithography or elasticity mapping.
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Cleveland Jason
Ducker William
Hansma Paul
Larkin Daniel S.
The Regents of the University of California
Williams Hezron E.
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