Method and apparatus for low-temperature semiconductor processin

Details Method and apparatus for low-temperature semiconductor processin Method and apparatus for low-temperature semiconductor processin

1992-08-14

1995-07-25

Chambers, A. Michael

Heat exchange

With retainer for removable article

Electrical component

25044111, 25044211, 2504431, F28D 1500

Patent

active

054353793

ABSTRACT:
A chilling system (12) has a container (20) filled with a coolant (22). A pipe (16) traverses within the container (20) and the coolant (22) to a housing (18). Fluid flows within the pipe (16) and becomes chilled through the pipe (16) upon entering the container (20) and the coolant (22). The chilled fluid enters the housing (18) chilling the housing (18) through the pipe (16). In turn, semiconductor substrate (19) in contact with the housing (18) also is chilled.

REFERENCES:
patent: 3566960 (1971-03-01), Stuart
patent: 5093579 (1992-03-01), Amemiya et al.

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